UiO MiNaLab – Micro and Nanotechnology Laboratory

UiO MiNaLab is one of four cleanrooms within the national infrastructure NorFab – The Norwegian Micro- and Nanofabrication Facility, supporting and enabling research and innovation within micro- and nanotechnology.

UiO MiNaLab offers open laboratory access for fabrication, characterization and collaborative research to all students and scientists at the University of Oslo, to the broader (public) research community in Norway and the EU, as well as industry and start-up professionals.

UiO MiNaLab has a 440 sq. m cleanroom with a ISO5 classification and several characterization laboratories. The infrastructure is targeted towards flexibility and provides equipment for the synthesis, modification and characterization of various material systems, such as semiconductors, metals, etc. The facility is operated by the Semiconductor physics group at the Department of Physics, the University of Oslo.


  • M. Amati, L. Gregoratti, P. Zeller, M. Greiner, M. Scardamaglia, B. Junker, T. Russ, U. Weimar, N. Barsan, M. Favaro, A. Alharbi, I.J.T Jensen, A. Ali, B. Belle. Near ambient pressure photoelectron spectro-microscopy: from gas-solid interface to operando devices. J. Phys. D: Appl. Phys. 54, 542021 (2021).
  • A. Azarov, V. Venkatachalapathy, L. Vines, E. Monakhov, I.-H. Lee, A. Kuznetsov. Activation energy of silicon diffusion in gallium oxide: Roles of the mediating defects charge states and phase modification. Appl. Phys. Lett. 119, 182103 (2021).
  • A. Azarov, V. Venkatachalapathy, E. Monakhov, A. Kuznetsov. Dominating migration barrier for intrinsic defects in gallium oxide: Dose-rate effect measurements. Appl. Phys. Lett.  118, 232101 (2021).
  • H.M. Ayedh, K.-E. Kvamsdal, V. Bobal, A. Hallén, F.C.C. Ling, A. Kuznetsov. Carbon vacancy control in p+-n silicon carbide diodes for high voltage bipolar applications. J. Phys. D: Appl. Phys 54, 455106 (2021).
  • E.M. Baba, P.M. Weiser, E.Ö. Zayim, and S. Karazhanov. Temperature-dependent photochromic performance of yttrium oxyhydride thin films. Phys. Status Solidi RRL 15, 2000459 (2021).
  • M.E. Bathen, A. Galeckas, R.M. Karsthof, A. Delteil, V. Sallet, A. Kuznetsov, L. Vines. Resolving Jahn-Teller induced vibronic fine structure of silicon vacancy quantum emission in silicon carbide. Phys. Rev. B. 104, 045120 (2021).
  • M.E. Bathen, L. Vines. Manipulating Single-Photon Emission from Point Defects in Diamond and Silicon Carbide. Adv. Quantum Technol. 4, 2100003 (2021).
  • A.K. Behera, C. Harris, D. Pete, C. Delker, P.E. Vullum, M. Benthem Muñiz, O. Koybasi, T. Taniguchi, K. Watanabe, B. Belle, S. Das. High-Performance and Ultralow-Noise Two-Dimensional Heterostructure Field-Effect Transistors with One-Dimensional Electrical Contacts. ACS Appl. Electron. Mater. 3, 4126--4134 (2021).
  • J. Bonkerud, C. Zimmermann, F. Herklotz, P.M. Weiser, C. Seiffert, E.F. Verhoeven, L. Vines, and E. Monakhov. Electrically-active defects in reduced and hydrogenated rutile TiO2. Semicond. Sci. Technol. 36, 014006 (2021).
  • A. Kaźmierczak-Bałata, L. Grzadziel, M. Guziewicz, V. Venkatachalapathy, A. Kuznetsov, and M. Krzywiecki. Correlations of thermal properties with grain structure, morphology, and defect balance in nanoscale polycrystalline ZnO films. Applied Surface Science 546, 149095 (2021).
  • E.S. Köksal, I. Põldsalu, H. Friis, S. Mojzsis, M. Bizzarro, I. Gözen. Spontaneous formation of prebiotic compartment colonies on Hadean Earth and pre-Noachian Mars. BioRxiv (2021)
  • J. Mayandi, A.M. Lind, M.F. Sunding, M. Schrade, A.C. Cerdeira, M.S.S Stange, M.R. Dias, B. Belle, T.G. Finstad, L. Pereira, S. Diplas, P.A. Carvalho. Partial Oxidation of High Entropy Alloys: A Route Towards Nanostructured Ferromagnets. Materialia 101250 (2021).
  • J. Mayandi, M. Schrade, P. Vajeeston, S. Ponniah, M.S.S. Stange, A.M. Lind, M.F. Sunding, D.M. Fleissner, J. Deuermeier, E. Fortunato, O.M. Løvvik, A. Ulyashin, S. Diplas, P.A. Carvalho, T.G. Finstad. High Entropy Alloy CrFeNiCoCu sputtered films. arXiv (2021).
  • J. Mayandi, R.K. Madathil, C. Abinaya, K. Bethke, V. Venkatachalapathy, K. Rademann, T.E. Norby, and T. Finstad. Al-doped ZnO prepared by co-precipitation method and its thermoelectric characteristics. Materials Letters 288, 129352 (2021).
  • M. Nyborg, A. Azarov, K. Bergum, E. Monakhov. Deposition and characterization of lithium doped direct current magnetron sputtered Cu2O films. Thin Solid Films 722, 138573 (2021).
  • I.J.T. Jensen, A. Ali, P. Zeller, A. Patrick, S.Matteo, M. Schrade, P.E. Vullum, M. Benthem Muñiz, P. Bisht, T. Taniguchi, K. Watanabe, M. Kenji; B.R. Mehta, L. Gregoratti, B. Belle. Direct Observation of Charge Transfer between NOx and Monolayer MoS2 by Operando Scanning Photoelectron Microscopy. ACS Appl. Nano Mater. 4, 3319--3324 (2021).
  • A. Kaźmierczak-Bałata, L. Grzadziel, M. Guziewicz, V. Venkatachalapathy, A. Kuznetsov, M. Krzywiecki. Correlations of thermal properties with grain structure, morphology, and defect balance in nanoscale polycrystalline ZnO films. Appl. Surf. Sci. 546, 149095 (2021).
  • V.S. Olsen, V. Øversjøen, D. Gogova-Petrova, B. Pecz, A. Galeckas, J.A. Borgersen, K. Karlsen, L. Vines, A. Kuznetsov. ZnSnN2 in Real Space and k-Space: Lattice Constants, Dislocation Density, and Optical Band Gap. Adv. Opt. Mater. 9, 2100015 (2021).
  • J.M. Polfus, M.B. Muñiz, A. Ali, D. Barragan-Yani, P.E. Vullum, M.F. Sunding, T. Taniguchi, K. Watanabe, B. Belle. Temperature-Dependent Adhesion in van der Waals Heterostructures. Adv. Mater. Interfaces 8, 2100838 (2021).
  • I. Poldsalu, E.S. Köksal, I. Gözen. Mixed fatty acid-phospholipid protocell networks. BioRxiv (2021)
  • X. Song, H. Riis, Ø. Prytz, T. Finstad. Metallization of ZnSb and contact resistance. J. Appl. Phys. 130, 025107 (2021).
  • K. Spustova, E.S. Köksal, A. Ainla, and I. Gözen. Subcompartmentalization and pseudo-division of model protocells. Small 17, 2005320 (2021).
  • A. Zaborowska, L. Kurpaska, M. Clozel, E.J. Olivier, J.H. O'Connell, M. Vanazzi, F. Di Fonzo, A. Azarov, I. Jóźwik, M. Frelek-Kozak, R. Diduszko, J.H. Neethling, J. Jagielski. Absolute radiation tolerance of amorphous alumina coatings at room temperature. Ceram. Int. 47, 34740-34750 (2021).
  • Partnership

    UiO MiNaLab is a partner in the national infrastructure NORFAB – The Norwegian Micro- and Nanofabrication Facility, together with NTNU NanoLab, USN MST Lab and SINTEF MiNaLab.

    UiO MiNaLab is also a part of NNN – The Nordic Nanolab Network and Euronanolab – The European Nanolab Network.




    UiO MiNaLab is funded by The Research Council of Norway and The University of Oslo.