- Check the power plug in
- Turn on power (backside of the kub)
- Press on button (frontside of the kub)
- Touch screen, the screen will be on with several selection
- Select masking (the mask holder will move out afterwards)
- Load the wafer into the wafer holder: note that the flat edge of the wafer must be fixed into the flat edge of the holder
- Load the mask into mask holder, the printed side is down (will contact the wafer)
- Touch the screen, the mask and wafer holder move in
- The screen will have have information: wafer is loaded, please wait until the screen change
- Screen has information:
- Thickness: enter thickness of substrate (= wafer thickness + PR thickness, Si wafer = 525 +- 25 µm), maximum substrate thickness is 2.6 mm
- Distant: enter distance (this is the distance between mask and wafe)
- Soft contact: distant = 10 µm
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Hard contact: distant = 0
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Wait until the wafer is loaded in position
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The screen: continue/cancel
- To cancel: press cancel
- To continue: Press continue
- Screen: New cycle/ memory
- When you program your setting parameter for illumination, the program would be saved as a cycle.
UV kub has total 10 program that can be saved. You can use a program that has been saved before, if you want the similar illumination parameter.
- Press memory if you want to a saved program, select cyle
For example: Cycle 2: mode - continous, duration: 40s, power: 100 %
- Press new cycle if you want to have new illumination parameter
Choose mode: select continous Duration: Duration = E /P * 100/power
if duration is 40s, press 40s if duration is 90s, press 1m30s
Power: 100 % (full power). For example: with 100 µm GM1070 SU8 photoresist, required UV illuminated energy is 1000 J/cm2. If we use continuos mode and full power, duration t = 1000(J/cm2) /23.4 (mW/cm2) * 100/100 = 43 s
- Note that whenever you select parameters, press enter to confirm your selection
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Press insolate, the wafer is illuminated. If you want to stop the illumination, press red button in front of the UV kub
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Insulate finish, touch screen
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Tray out: the wafer and mask holder move out. Take mask and wafer out.
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Touch screen, the tray moves in
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The screen: continue/cancel. Select cancel
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Turn off on/off button in front of the UV kub (screeen change to balck)
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Turn off power (backside of the UV kub)