Cross Section Polishing

The Micro and Nanotechnology Laboratory at the University of Oslo (UiO MiNaLab) is equipped with a JEOL IB-19520CCP Cross Section Polisher (CCP), installed in 2017, which is suitable for the preparation of pristine cross-sections of a specimen for analytical scanning electron microscopy (SEM-EDS), electron probe microanalysis (EPMA), or scanning probe microscopy (SPM).

Cross-sections of layered materials, metals, ceramics, porous materials or even plastics and paper can be prepared with little roughness over a wide area (larger than 500μm). Thermal damage of heat-sensitive materials (e.g., low melting point metals and composite materials) can be reduced by cooling the specimen with liquid nitrogen during processing. A transfer vessel allows vacuum transfer of the polished sample to our JEOL IT-300 SEM without exposure to air.

Main Specifications

  • Accelerating voltage: 2 to 8 kV.
  • Ion beam width: 500 μm (FWHM).
  • Milling speed: 500 μm/h (accelerating voltage 8kV; Si; 100 μm from edge).
  • Maximum specimen size: 11 mm (W) x 8 mm (L) x 3 mm (T).
  • Specimen holder ultimate cooling temperature: – 120 oC or less.
  • Specimen cooling hold time: 8 h or more.
  • Air isolation system: transfer vessel.


The cross section polisher is available for rent with or without an operator. Prices are in Norwegian kroner (NOK) excl. VAT. All prices are subject to change.

User Category Price without operator/hour Price with operator/hour
Academia 100 NOK 850 NOK
Start-up 125 NOK 1225 NOK
Industry 150 NOK 1250 NOK

The reduced fees for start-up companies are available for the first 24 months after start-up. Training costs are currently covered by NorFab.


Published May 3, 2021 9:44 PM - Last modified June 4, 2021 9:30 AM