Ellipsometry can probe the complex refractive index or dielectric function tensor, which gives access to fundamental physical parameters and is related to a variety of sample properties. It is commonly used to characterize film thickness for single layers or complex multilayer stacks ranging from >10 nm to several μm.
Instrument Features
- Spectral Range: 380 nm to 900 nm.
- Angle of Incidence: 65°, 70°, 75° or 90°.
- Data Acquisition Rates: 3 sec (Fast mode), 10 sec (Standard mode), 30 sec (High precision mode).
- Beam Diameter: ~3 mm.
Prices
The ellipsometer is available for rent with or without an operator. Prices are in Norwegian kroner (NOK) excl. VAT. All prices are subject to change.
| User Category | Price without operator/hour | Price with operator/hour |
|---|---|---|
| Academia | 100 NOK | 850 NOK |
| Start-up | 125 NOK | 1225 NOK |
| Industry | 150 NOK | 1250 NOK |
The reduced fees for start-up companies are available for the first 24 months after start-up. Training costs are currently covered by NorFab.
Contact
- Simon Phillip Cooil, Lab Manager
- Eirini Zacharaki, Research Infrastructure Coordinator