Heidelberg μPG 501 Maskless Lithography

The Micro and Nanotechnology Laboratory at the University of Oslo (UiO MiNaLab) is equipped with a Heidelberg μPG 501 Maskless ultra-violet Photolithography system, installed in 2014.

The μPG 501 is a micro pattern generator for direct writing applications. The system can be used for prototyping MEMS, Bio-MEMS, integrated optics, and microfluidics (a prime example is Lab-on-a-Chip devices), or any other application that requires high precision, high-resolution microstructures.

The μPG 501 is equipped with a 10W light-emitting diode operating at 390 nm, a 600×800 pixel digital micro-mirror device, and a motorized stage to expose patterns on resist-coated substrates. The μPG 501 can expose standard positive and negative photoresists as well as UV-resists.

The Heidelberg Software is compatible with GDSII, DXF, GERBER, CIF, BMP, and STL files.

System Specifications

  • Maximum substrate size: 152.5 × 152.5 mm² (6 × 6 in.²)
  • Minimum substrate size: 10 × 10 mm²
  • Maximum writing area: 125 × 125 mm²
  • Substrate thickness: 0 to 6 mm
  • Substrate flatness: < ± 20 µm

Writing Performance

  • Minimum feature size: 1 μm 
  • CD uniformity (3σ): 200 nm
  • Write speed: 50 mm²/min
  • Address grid: 50 nm
  • Line edge roughness (3σ): 100 nm
  • Alignment accuracy (3σ): 200 nm

Sample Preparation Equipment

  • Laurell Spin Coater. The photoresist film coating Laurell WS-MZ spinner used is a programmable spinner operating at 100 – 1200 RPM. A hotplate is used for photoresist baking.

A separate training session is needed before new users are allowed to work independently with the photoresist coater.


The Heidelberg μPG 501 maskless photolithography system is available for rent with or without an operator. Prices are in Norwegian kroner (NOK) excl. VAT. All prices are subject to change.

User Category Price without operator/hour Price with operator/hour
Academia 300 NOK 1050 NOK
Start-up 375 NOK 1475 NOK
Industry 450 NOK 1550 NOK

The reduced fees for start-up companies are available for the first 24 months after start-up. Training costs are currently covered by NorFab.


Published May 3, 2021 9:48 PM - Last modified June 4, 2021 9:32 AM