Stylus Profiler

The Micro and Nanotechnology Laboratory at the University of Oslo (UiO MiNaLab) is equipped with two stylus profilers. A Veeco Dektak 8 contact profilometer, installed in 2004, which performs 2D- and 3D-surface profile measurements to characterize film thickness, roughness, and stress on samples up to 200 mm (8 in.) in diameter. In 2021 a Bruker DektakXT-A was also installed in the cleanroom.

The operation of the profilometer is based on a sharp stylus that is scanned across a surface so that the surface topography of the sample is obtained. User-programmable stylus force allows profiling on hard and soft surfaces.

The stylus profilometers are capable of a wide variety of measurements, including MEMS characterization, thin- and thick-film coatings, thin-film stress calculations, roughness on wafers, transparent films and photoresist thickness, metal etch uniformity, etc.

System Features and Specifications (Veeco Dektak 8)

  • Vertical Range: 25 Å to 262 μm.
  • Vertical Resolution: 1 Å max (at 6.55 μm range).
  • Scan Length Range: 50 μm to 50 mm.
  • Scan Duration Range: 3 s – 100 s
  • Max. Sample Thickness: 25.4 mm.
  • Max. Wafer Size: 200 mm.
  • Max. Sample Weight: 2.5 kg.
  • Stylus Force: programmable, 1 mg – 15 mg.
  • Stylus Options: Diamond-tipped, 12.5 μm radius (standard) and 5 μm radius (for scratch-free characterization of delicate sample, e.g. Au or oxide films).
  • Software: Vision ® 32 3D analysis package; D8-STRESS software.

System Features and Specifications (Bruker DektakXT-A)

  • Vertical Range: 1 Å to 1 mm.
  • Vertical Resolution: 1 Å max (at 6.55 μm range).
  • Scan Length Range: 55 mm with up to 120 000 data points per scan.
  • Max. Sample Thickness: 50 mm.
  • Max. Wafer Size: 200 mm.
  • Stylus Force: programmable, 1 mg – 15 mg.
  • Stylus Options: Diamond-tipped, 12.5 μm radius (standard) and 5 μm radius (for scratch-free characterization of delicate sample, e.g. Au or oxide films).
  • Stitching Capabilities: Allows for stitching of multiple scans together generating a seamless scan that covers 6 inches (150 mm) of motorized travel.
  • Stress Measurements: The 2D stress measurement capability calculates tensile and compressive stress simultaneously.  
  • Software: Vision ® 64 Operation and Analysis software.

Prices

The Dektak 8 stylus profilometer is available for rent with or without an operator. Prices are in Norwegian kroner (NOK) excl. VAT. All prices are subject to change.

User Category Price without operator/hour Price with operator/hour
Academia 300 NOK 1050 NOK
Start-up 375 NOK 1475 NOK
Industry 450 NOK 1550 NOK

The reduced fees for start-up companies are available for the first 24 months after start-up. Training costs are currently covered by NorFab.

Contact

Published May 3, 2021 11:44 PM - Last modified Oct. 29, 2021 8:45 AM