The operation of the profilometer is based on a sharp stylus that is scanned across a surface so that the surface topography of the sample is obtained. User-programmable stylus force allows profiling on hard and soft surfaces.
The stylus profilometers are capable of a wide variety of measurements, including MEMS characterization, thin- and thick-film coatings, thin-film stress calculations, roughness on wafers, transparent films and photoresist thickness, metal etch uniformity, etc.
System Features and Specifications (Veeco Dektak 8)
- Vertical Range: 25 Å to 262 μm.
- Vertical Resolution: 1 Å max (at 6.55 μm range).
- Scan Length Range: 50 μm to 50 mm.
- Scan Duration Range: 3 s – 100 s
- Max. Sample Thickness: 25.4 mm.
- Max. Wafer Size: 200 mm.
- Max. Sample Weight: 2.5 kg.
- Stylus Force: programmable, 1 mg – 15 mg.
- Stylus Options: Diamond-tipped, 12.5 μm radius (standard) and 5 μm radius (for scratch-free characterization of delicate sample, e.g. Au or oxide films).
- Software: Vision ® 32 3D analysis package; D8-STRESS software.
System Features and Specifications (Bruker DektakXT-A)
- Vertical Range: 1 Å to 1 mm.
- Vertical Resolution: 1 Å max (at 6.55 μm range).
- Scan Length Range: 55 mm with up to 120 000 data points per scan.
- Max. Sample Thickness: 50 mm.
- Max. Wafer Size: 200 mm.
- Stylus Force: programmable, 1 mg – 15 mg.
- Stylus Options: Diamond-tipped, 12.5 μm radius (standard) and 5 μm radius (for scratch-free characterization of delicate sample, e.g. Au or oxide films).
- Stitching Capabilities: Allows for stitching of multiple scans together generating a seamless scan that covers 6 inches (150 mm) of motorized travel.
- Stress Measurements: The 2D stress measurement capability calculates tensile and compressive stress simultaneously.
- Software: Vision ® 64 Operation and Analysis software.
Prices
The Dektak 8 stylus profilometer is available for rent with or without an operator. Prices are in Norwegian kroner (NOK) excl. VAT. All prices are subject to change.
| User Category | Price without operator/hour | Price with operator/hour |
|---|---|---|
| Academia | 300 NOK | 1050 NOK |
| Start-up | 375 NOK | 1475 NOK |
| Industry | 450 NOK | 1550 NOK |
The reduced fees for start-up companies are available for the first 24 months after start-up. Training costs are currently covered by NorFab.
Contact
- Simon Phillip Cooil, Lab Manager
- Eirini Zacharaki, Research Infrastructure Coordinator