ToF-ERDA analysis is quantitative without standards and can be used to obtain concentration depth profiles of matrix and impurity elements in the analyzed sample. Despite that practically all elements can be detected, this technique is most sensitive for light elements such as H, Li, B, C, N, O, etc.
The ToF-ERDA system at the Micro and Nanotechnology Laboratory at the University of Oslo (UiO MiNaLab) is based on 1 MV NEC Tandem accelerator and high energy heavy ions, such as Cl or Cu, are typically used as an analyzing beam.
Instrument Features
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Elements detected: H-U, most sensitive for light elements i.e., H, Li, B, C, N, O
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Detection limits: ~0.1 at.%
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Depth of analysis: < 200 nm
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Depth resolution: 5 nm
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Non-destructive
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Quantitative without standards
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Vacuum compatible materials
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Sample sizes: 10 × 10 mm (standard)
Prices
For ToF-ERDA an operator is required. Prices are in Norwegian kroner (NOK) excl. VAT. All prices are subject to change.
| User Category | Price with operator/hour |
|---|---|
| Academia | 1750 NOK |
| Start-up | 2350 NOK |
| Industry | 2600 NOK |
The reduced fees for start-up companies are available for the first 24 months after start-up. Training costs are currently covered by NorFab.
Contact
- Simon Phillip Cooil, Lab Manager
- Eirini Zacharaki, Research Infrastructure Coordinator