NorFab: Norwegian Micro - and Nano Fabrication Facility

NorFab provides access to state-of-the-art laboratories for Norwegian researchers, supporting and enabling research and innovation within micro-and nanotechnology.


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Photo: Geir Mogen

     Contact information 

        Lab Manager: Vegard Skiftestad Olsen


        Location:                                                                     Gaustadalléen 23 C, 0373 Oslo, Norway



UiO MiNaLab is one of four cleanroom facilities within the national infrastructure, "The Norwegian Micro- and Nanofabrication Facility", NorFab, together with NTNU NanoLab, USN MST Lab and SINTEF MiNaLab. The UiO MiNaLab facility is open to all students and scientists at UiO, as well as external researchers and start-up companies.

UiO MiNaLab has a 440 m2 cleanroom with a ISO5 classification and several characterization laboratories. The infrastructure is targeted towards flexibility and can handle a variety of materials systems. 

Technologies at UiO MiNaLab

For a detailed list of instruments available at UiO MiNaLab with instrument specifications, please visit the NorFab website.

Synthesis and fabrication

  • Physical vapor deposition (PVD):
    • Magnetron sputtering (DC, RF, HiPIMS, Remote plasma)
    • E-beam evaporation
    • Thermal evaporation
  • Chemical vapor deposition (CVD):
    • Atomic layer deposition (ALD)
    • Plasma-enhanced chemical vapor deposition (PECVD)
    • Metal-organic chemical vapor deposition (MOCVD)

Material modification/processing

  • Modification techniques:
    • Ion implantation
  • Processing:
    • Laser cutter
    • Cross-section polishing
    • Maskless photolithography
    • Tube furnace
    • Rapid thermal annealing (RTA)

Material characterization

  • Electrical and electrochemical
    • Hall measurements (room-temperature, high-temperature and low temperature)
    • 4-point probe
    • Solar simulator
    • Quasi-steady state photoconductance (QSSPC)
    • Probe station (IV, CV)
    • Scanning spreading resistance microscopy (SSRM)
  • Optical and imaging
    • Cathodoluminescence (CL)
    • Spectrophotometer (UV-VIS)
    • Fourier-transform infrared spectroscopy (FTIR)
    • Ellipsometry
    • Scanning electron microscopy (SEM)
    • Optical microscope
  • Structure, composition and topography
    • X-ray diffraction (XRD)
    • Scanning probe microscopy (SPM)
    • Stylus profiler
    • SEM based energy dispersive spectroscopy (EDS)
    • Rutherford backscattering spectrometry (RBS)
    • Ultraviolet photoelectron spectroscopy (UPS)
    • X-ray photoelectron spectroscopy (XPS)
    • Angular-resolved photoemission spectroscopy (ARPES)
    • Low-energy electron diffraction (LEED)

UiO research groups using UiO MiNaLab

Irep Gözen group - Centre for Molecular Medicine

Nanostructures and functional materials group (NAFUMA)

Nanoelectronics group (Nano)

Semiconductor physics group (LENS)

Structure physics group

Recent publications using the NorFab infrastructure


  • Camilla Sommerseth; Ove Darell; Bjarte Arne Øye; Anne Støre & Stein Rørvik (2020). Charcoal and Use of Green Binder for Use in Carbon Anodes in the Aluminium Industry, In Alan Tomsett (ed.),  Light Metals 2020.  Springer.  ISBN 978-3-030-36407-6.  Conference paper.  s 1338 - 1347
  • Avisek Roy; Luca Marchetti; Mehdi Azadmehr; Philipp Häfliger; Bao Quoc Ta & Knut Aasmundtveit (2020). Characterization of Polysilicon Microstructures to Estimate Local Temperature on CMOS Chips, In  2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC).  IEEE.  ISBN 978-1-7281-6293-5.  Conference Paper.
  • Per Kristian Bolstad; Stephane Kuziora; Hoang-Vu Nguyen; Tung Manh; Knut Aasmundtveit & Lars Hoff (2020). Impact of High Pressures on Au-Sn Solid Liquid Interdiffusion (SLID) Bonds, In  2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC).  IEEE.  ISBN 978-1-7281-6293-5.  Conference Paper.
  • Phillip Papatzacos; Muhammad Nadeem Akram; Eivind Bardalen & Per Øhlckers (2020). Simulated effects of wet-etched induced surface roughness on IR transmission and reflection, In  2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC).  IEEE.  ISBN 978-1-7281-6293-5.  Conference Article.
  • Nu Bich Duyen Do; Erik Andreassen & Kristin Imenes (2020). Thermal management with a new encapsulation approach for a medical device, In  2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC).  IEEE.  ISBN 978-1-7281-6293-5.  ESTC 2020.
  • Nhut Tran; Frank Karlsen & Bendik Fyhn Terjesen (2017). Hydrodynamic Study of a Continuous Large Volume Sorting and Concentration Technology for Particles and Cells in Micrometre Range, In Boguslaw Kruczek (ed.),  Proceedings of the 4th International Conference of Fluid Flow, Heat and Mass Transfer.  Avestia Publishing.  ISBN 978-1-927877-37-1.  Paper No. 172.
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Tags: Nano- and microtechnology, Nanotechnology, Materials Science and Technology, Materials science
Published Sep. 1, 2020 10:37 AM - Last modified Dec. 22, 2020 10:30 AM