Physical Vapor Deposition: Electron-beam Evaporation and Resistive Heating

For applications that require high-quality interfaces and thin films, the Polyteknik Tornado and Angstrom e-beam systems are recommended. The simpler Balzers-resistive heating system is on the other hand able of high-rate depositions. The lab has several sample preparation options.

Sample Preparation Options

• Ultrasonic bath for acetone, isopropanol, DI-water surface cleaning.
• Acidic cleaning methods.
• Metal/Si masks.
• Maskless photolithography, Heidelberg μPG 501.

Instrument Features – Polyteknik Tornado e-beam System

• One e-beam source.
• Low vacuum below 1e-7 torr base pressure.
• Load-lock: ensures reduced pump-down time and time-efficient depositions.
• Substrate size: 4 in. (Ø 10.16 cm) wafer chamber, but smaller samples can be mounted. Multi-layer deposition option, up to 8 different layers without breaking vacuum.
• Film-thickness: down to 10 nm thick.
• Available protocols for e-beam deposition: Ag, Al, Au, Cr, Ti, Ni, Si, Pd, Pt, SiO₂.

Instrument Features – Angstrom EvoVac System

• 1 e-beam and 2 resistive heater sources.
• Low vacuum: < 1e-7 torr.
• Large area sample holder, 6 in. (Ø 15 cm) with substrate heating (up to 500 ^oC).
• Multi-layer deposition option, up to 6 different layers without breaking vacuum.
• Film-thickness: down to 10 nm thick.
• High purity O₂ gas inlet next to sample holder (0 – 20 sccm).
• Co-deposit, up to three materials in parallel.
• Available protocols for e-beam deposition: Al, Ti, Ni, NiO, Pt, Pd, SiO₂. Other materials may be available upon request.

Instrument Features – Balzers BAE 250 System

• One resistive heating source.
• Low vacuum: 7.5e-7 torr.
• Holder size: 3.5 in. (Ø 9 cm).
• Manual power control only.
• High rate-depositions, up to 200 nm/s.
• Available protocols: Al, Au, Ag, Ni, Zn, Sn, In.
   

Prices

The Polyteknik Tornado e-beam system is available for rent with or without an operator.

For the Angstrom EvoVac e-beam system, the corresponding charges are as follows.

For the Balzers thermal evaporation system, the corresponding charges are as follows.

Prices are in Norwegian kroner (NOK) excl. VAT. All prices are subject to change. The reduced fees for start-up companies are available for the first 24 months after start-up. Training costs are currently covered by NorFab.

Contact

• Simon Phillip Cooil, Lab Manager
• Eirini Zacharaki, Research Infrastructure Coordinator