Physical Vapor Deposition: Electron-beam Evaporation and Resistive Heating

Several instruments for Physical Vapor Deposition (PVD) exist at The Micro and Nanotechnology Laboratory at the University of Oslo (UiO MiNaLab). 

For applications that require high-quality interfaces and thin-films, the Angstrom and Leybold e-beam systems are recommended. The simpler Balzers-resistive heating system is on the other hand able of high-rate depositions. The lab has several sample preparation options.

Sample Preparation Options

  • Ultrasonic bath for acetone, isopropanol, DI-water surface cleaning.
  • Acidic cleaning methods.
  • Metal/Si masks.
  • Maskless photolithography, Heidelberg μPG 501.

Instrument Features – Angstrom EvoVac System

  • 1 e-beam and 2 resistive heater sources.
  • Low vacuum: < 1e-7 torr.
  • Large area sample holder, 6 in. (Ø 15 cm) with substrate heating (up to 500 oC).
  • Multi-layer deposition option, up to 6 different layers without breaking vacuum.
  • Film-thickness: down to 10 nm thick.
  • High purity O2 gas inlet next to sample holder (0 – 20 sccm).
  • Co-deposit, up to three materials in parallel.
  • Available protocols for e-beam deposition: Al, Ti, Ni, NiO, Pt, Pd, SiO2. Other materials may be available upon request.

Instrument Features – Leybold L560 e-beam System

  • One e-beam source.
  • Low vacuum < 8e-7 torr.
  • Batch processing, up to 4 × 5 in. (Ø 13 cm) sample holders simultaneously.
  • Multi-layer deposition option, up to 8 different layers without breaking vacuum.
  • Film-thickness: down to 10 nm thick.
  • Available protocols: Ag, Al, Au, Ti, Ni, Si, Pd, Pt (Al, Si, and Ni are included in the hourly price, for other metals please contact the UiO MiNaLab administration.)

Instrument Features – Balzers BAE 250 System

  • One resistive heating source.
  • Low vacuum: 7.5e-7 torr.
  • Holder size: 3.5 in. (Ø 9 cm).
  • Manual power control only.
  • High rate-depositions, up to 200 nm/s.
  • Available protocols: Al, Au, Ag, Ni, Zn, Sn, In.
     

Prices

The Angstrom EvoVac and Leybold e-beam systems are available for rent with or without an operator.

User Category Price without operator/hour Price with operator/hour
Academia 500 NOK 1250 NOK
Start-up 625 NOK 1725 NOK
Industry 750 NOK 1850 NOK

 

For the Balzers thermal evaporation system, the corresponding charges are as follows.

User Category Price without operator/hour Price with operator/hour
Academia 300 NOK 1050 NOK
Start-up 375 NOK 1475 NOK
Industry 450 NOK 1550 NOK

Prices are in Norwegian kroner (NOK) excl. VAT. All prices are subject to change. The reduced fees for start-up companies are available for the first 24 months after start-up. Training costs are currently covered by NorFab.

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Published May 3, 2021 9:19 PM - Last modified June 4, 2021 9:21 AM