Scanning Electron Microscope (SEM), Energy Dispersive X-ray Microanalysis (EDS) and Cathodoluminescence (CL)

The Micro and Nanotechnology Laboratory at the University of Oslo (UiO MiNaLab) is equipped with a JEOL JSM-IT300LV Scanning Electron Microscope (SEM), installed in 2017, which is suitable for high-resolution imaging, semi-quantitative X-ray microanalysis, as well as cathodoluminescence imaging and spectral analyses. 

The microscope’s low vacuum capability allows observation of non-conductive samples in their natural state, without the need for metal coating. In-situ experiments can be performed with the use of a cooling/heating stage at the temperature range -185 °C to 200 °C.

Detectors

  • Secondary electron (SE) detector (Everhardt-Thornley, E-T).
  • Backscattered electron (BSE) detector (Si P-N junction semiconductor detector).
  • Thermo Scientific Ultra Dry silicon drift X-ray detector (SSD) 60 mm2 with Norvar light element window and energy resolution (MnKα FWHM) at 127.8 eV, running on a Noran System 7 (Pathfinder software) for semi-quantitative elemental analysis and mapping.
  • Delmic SPARC Cathodoluminescence system, running on the ODEMIS software.

Instrument Features

  • Large chamber accommodating samples up to 200 mm in diameter and 50 mm in height.
  • Gatan C1002 cooling/heating stage and temperature controller Gatan Model 10905.
  • 5-axis motorized stage with eucentric tilt (-10 to 65°) and 360° rotation.
  • Thermionic-emission LaB6 electron gun.
  • Accelerating Voltage: 0.3 – 30 kV.
  • Resolution: 3 nm (30 kV, WD 8 mm, SE); 4 nm (30 kV, WD 5 mm, 10 Pa, BSE). 
  • Magnification: 5 – 300k ×.
  • Low Vacuum Mode: 10 – 650 Pa.

Sample Preparation Equipment

A separate training session is needed before new users are allowed to work independently with the cross section polisher.

  • Metal Coating. Samples that do not conduct electricity can be coated with thin, conductive films before they are imaged at the SEM. Conductive coatings inhibit charging and reduce the sample’s thermal damage. At UiO MiNaLab we have several metal coating capabilities. Please contact the UiO MiNaLab administration to inquire about thin film metal coating for sample preparation for microscopy.

Prices

The SEM-EDS-CL is available for rent with or without an operator. Prices are in Norwegian kroner (NOK) excl. VAT. All prices are subject to change.

User Category Price without operator/hour Price with operator/hour
Academia 500 NOK 1250 NOK
Start-up 625 NOK 1725 NOK
Industry 750 NOK 1850 NOK

The reduced fees for start-up companies are available for the first 24 months after start-up. Training costs are currently covered by NorFab.

Contact

Published May 3, 2021 11:18 PM - Last modified June 4, 2021 9:39 AM