Focus areas and technologies
UiO MiNaLab is equipped with a wide range of traditional microfabrication and state-of-the-art nanofabrication equipment, as well as an extensive range of equipment for materials and devices electronic and optical characterization and nanometrology methods.
Thin film deposition
Physical vapor deposition (PVD)
Chemical vapor deposition (CVD)
Materials modification and processing
Modification techniques
Processing
Characterization
Electrical
Optical and imaging
- Scanning electron microscopy (SEM)
- Cathodoluminescence (CL)
- Spectrophotometer (UV-VIS)
- Fourier-transform infrared spectroscopy (FTIR)
- Ellipsometry
Structure, composition and topography
- X-ray diffraction (XRD)
- Photoelectron Spectroscopy (XPS/UPS), Angle Resolved Photoelectron spectroscopy (ARPES) and Low Energy Electron Diffraction (LEED)
- Stylus profiler
- SEM based energy dispersive spectroscopy (EDS)
- Rutherford backscattering spectrometry (RBS)
- Time-of-flight elastic recoil detection analysis (ToF-ERDA)